AVS Journal of Vacuum Science & Technology A
The AVS Journal of Vacuum Science & Technology A is soliciting research articles for publication in a Special January/February 2018 Issue on Atomic Layer Deposition along with a Special Issue on Atomic Layer Etching.
The Special Issues will be dedicated to the science and technology of atomic layer controlled deposition of thin films. While a significant fraction of the articles expected are to be based on material presented at ALD 2017 and the ALE Workshop, research articles that are on ALD and ALE but not presented at this conference are also welcome: the special issue will be open to all articles on the science and technology of ALD and ALE.
Papers will be reviewed using the same criteria as regular JVST articles and must meet JVST standards for both technical content and written English. To be published in JVST, the manuscript must:
- Present original findings, conclusions or analysis that have not been published previously
- Be free of errors and ambiguities,
- Support conclusions with data and analysis,
- Written clearly, and
- Have high impact in its field.
Authors are encouraged to use the JVST templates. The easiest way to prepare your manuscript is to use the available JVST Article Template to delete and replace text as necessary. This file and the template used to create it are available at the site above. Online, you will have an opportunity to tell us that your paper is a part of the special issue by choosing “ALD Special Issue or ALE Special Issue.”
Acceptable manuscript file types are MSWord, LaTeX, and PDF. For the initial submission/review process, a single PDF or MSWord file including the figures is sufficient. However, once a paper is accepted, MSWord or TeX file of the text, any tables and the list of figure captions along with the separate figure files will be required for final production. Use of color in Figures is encouraged. Your FIGURES CAN APPEAR ONLINE IN COLOR FOR FREE. Prepare illustrations in the final published size, not oversized or undersized.
Manuscript Deadline: September 5, 2017
Note: Please observe the deadline to allow for timely processing. JVST will try to include papers submitted after this deadline but we can not guarantee that they will be included in the special issue. Papers will appear online in the Special Issue as soon as they are accepted.