Committee

ALD 2017
Program Chairs:

John F. Conley, Jr.
Oregon State University, USA

Charles L. Dezelah
EMD Performance Materials, USA

ALD 2017 Program Committee:

• Parag Banerjee (Washington University in St. Louis, USA)
• Sean Barry (Carlton University, Canada)
• Iain Buchanan (Versum Materials, UK)
• Robert Clark (TEL, USA)
• Scott Clendenning (Intel, USA)
• Neil Dasgupta (University of Michigan, USA)
• Christophe Detavernier (University of Ghent, Belgium)
• Christian Dussarrat (Air Liquide)
• Simon Elliott (Tyndall National Institute, Ireland)
• Dennis Hausmann (Lam Research, USA
• Ravi Kanjolia (EMD Performance Materials, USA)
• Jiyoung Kim (University of Texas at Dallas, USA)
• Mato Knez (Nanogune, Spain)
• Harm Knoops (Oxford Instruments, UK)
• Han-Jin Lim (Samsung Electronics, Korea)
• Mike McSwiney (Intel, USA)
• Yongfeng Mei (Fudan University, China)
• Jin-Seong Park (Hanyang University, Korea)
• Paul Poodt (TNO/Holst Center, The Netherlands)
• Matti Putkonen (VTT, Finland)
• Riikka Puurunen (VTT, Finland)
• Mikko Ritala (University of Helsinki, Finland)
• Gary Rubloff (Maryland NanoCenter, USA)
• Simon Rushworth (EpiValence, UK)
• Uwe Schroeder (Namlab, Germany)
• Ganesh Sundaram (Ultratech, USA)
• Jonas Sundqvist Fraunhofer IKTS, Germany)
• Christophe Vallee (LETI-LTM, France)
• Virginia Wheeler (U.S. Naval Research Laboratory, USA)
• Charles Winter (Wayne State University, USA)

 

ALD 2017 Poster Chairs:

• Angel Yanguas-Gil (Argonne National Lab, USA)
• Nicholas Strandwitz (Lehigh Univ., USA)

ALD 2017 Social Media Chair:

• Riikka Puurunen (VTT, Finland)

ALD International Advisory Committee:

• Yves Chabal (University of Texas at Dallas, USA)
• Jeffrey Elam (Argonne National Laboratory, USA)
• Annelies Delabie (IMEC, Belgium)
• Steven M. George (University of Colorado at Boulder, USA)
• Roy Gordon (Harvard University, USA)
• Suvi Haukka (ASM, Finland)
• Cheol Seong Hwang (Seoul National University, Korea)
• Hyeongtag Jeon (Hanyang University, Korea)
• Erwin Kessels (University of Eindhoven, The Netherlands)
• Hyungjun Kim (Yonsei University, Korea)
• Sang In Lee (Synos Foundation, USA)
• Markku Leskelä (University of Helsinki, Finland)
• Paul Ma (Applied Materials, USA)
• Gregory N. Parsons (North Carolina State University, USA)
• Stephen Rossnagel (IBM TJ Watson Research Center, USA)

ALE 2017
Workshop Program Chairs:

Steve M. George
University of Colorado at Boulder, USA

Keren J. Kanarik
Lam Research, USA

ALE 2017 Workshop Program Committee:

• Ankur Agarwal (Applied Materials, USA)
• Sumit Agarwal (Colorado School of Mines, USA)
• David Boris (U.S. Naval Research Laboratory, USA)
• Robert Bruce (IBM TJ Watson Research Center, USA)
• David Coumou (MKS Instruments, USA)
• Jean-Francois de Marneffe (IMEC, Belgium)
• Bert Ellingboe (Dublin City University, Ireland)
• Craig Huffman (Micron, USA)
• Eric Joseph (IBM TJ Watson Research Center, USA)
• Harm Knoops (Oxford Instruments, The Netherlands)
• Akira Koshiishi (Samsung, USA)
• Venkat Pallem (Air Liquide, USA)
• Alok Ranjan (Tokyo Electron, Japan)
• Shahid Rauf (Applied Materials, USA)
• Fred Roozeboom (TU Eindhoven/TNO, The Netherlands)
• Iqbal Saraf (Tokyo Electron, USA)
• Satyarth Suri (Intel, USA)
• Dmitry Suyatin (Lund University, Sweden)
• Geun Young Yeom (Sungkyunkwan University, Korea)